SUBSTRATE PROCESSING APPARATUS

摘要

PURPOSE: A substrate processing apparatus is provided to reduce an installation space and shorten a substrate processing time by arranging a local processing unit with square shape from an entrance located in one side of an index unit to an exit vertically located in one side of the index part. CONSTITUTION: A local processing unit is arranged with a square shape from an entrance located in one side of an index unit to an exit of the index unit. A substrate rotating unit(300) is positioned on the corner part of the local processing unit. The substrate rotating unit rotates the substrate with 90 angles and leads in a transfer conveyor(C1) of the rear chamber. The Index unit includes a load port(110) placed in a cassette and a transfer unit. The local processing unit includes a moisture processing chamber(210) and a defensive processing chamber. The moisture processing chamber is arranged in the entrance of the index unit.