| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a compact, high-efficiency and simple ultrasonic motor by configuring stacked single-plate piezoelectric vibrators at a side ratio different from a conventional one. <P>SOLUTION: Rectangular single-plate piezoelectric vibrators are laminated to configure a multilayer piezoelectric vibrator 50. The multilayer piezoelectric vibrator 50 vibrates in a multiple vibration mode obtained by combining a diffusion vibration mode and a flexural vibration mode to generate a driving force. In the ultrasonic motor, when w/L corresponds to the resonant frequency of the diffusion vibration mode and w/L corresponds to the resonant frequency of the flexural vibration mode, the single-plate piezoelectric vibrators are formed based on the value of w/L at which the resonant frequency of the diffusion vibration and the resonant frequency of the flexural vibration are substantially the same, where L is the length of one of two pairs of sides of the single-plate piezoelectric vibrators and w is the length of the other pair of sides and w/L is a variable. The single-plate piezoelectric vibrators are laminated in a thickness direction. <P>COPYRIGHT: (C)2010,JPO&INPIT |
