COLLECTOR ASSEMBLY, RADIATION SOURCE, LITHOGRAPHIC APPARATUS, AND DEVICE MANUFACTURING METHOD.,申请号NL20092003430-传众专利搜索

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发明名称	COLLECTOR ASSEMBLY, RADIATION SOURCE, LITHOGRAPHIC APPARATUS, AND DEVICE MANUFACTURING METHOD.
摘要
申请公布号	NL2003430(A)	申请公布日期	2010.04.20
申请号	NL20092003430	申请日期	2009.09.03
申请人	ASML NETHERLANDS B.V.,	发明人	SOER, WOUTER;JAK, MARTIN
分类号	G03F7/20;H05G2/00	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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