| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of an organic EL element capable of attaining an organic EL element satisfying excellent drive durability characteristics and neglect-proof degradation characteristics. Ž<P>SOLUTION: In the manufacturing method of the organic EL device provided with an organic EL element made up by forming a lower electrode, an organic compound layer, and an upper electrode formed in turn on a substrate, at least processes shown in (i) to (iii) below are carried out after the lower electrode and a pixel separation film are formed. In the process (i), plasma treatment is carried out on a substrate under an oxygen-content gas atmosphere with inside-system pressure kept at 0.05 Pa or more and 5 Pa or less by introducing gas at least containing oxygen in the system or exhausting air. In the process (ii), UV light rays are irradiated on the substrate under an oxygen-content gas atmosphere with inside-system pressure kept at 10 Pa or more and 10,000 Pa or less by introducing gas at least containing oxygen in the system or exhausting air. In the process (iii), an organic compound layer is formed on the lower electrode. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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