| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a polishing sheet used in a polishing pad for use in polishing, and capable of moderating a degree of abrasion and stabilizing polishing performance. <P>SOLUTION: The polishing pad includes a urethane sheet having a polishing surface. The urethane sheet is formed of a mixture of a polyisocyanate compound, a polyol compound, a dispersion liquid having water dispersed in the polyol compound, and a polyamine compound, and includes a foam structure. A content HSC of hard segments is controlled to be in a range of 32-42%, an equivalence ratio R in a range of 0.7-0.9, a bulk density D in a range of 0.45-0.55 g/cm<SP>3</SP>, and a thickness T in a range of 0.5-2.0 mm, respectively. Abrasion loss on the polishing surface ranges from 100 to 200 mg. The bulk density D correlates with the foam structure, the content HSC correlates with hardness, and the thickness T correlates with a service life, respectively. <P>COPYRIGHT: (C)2010,JPO&INPIT |
