VIBRATION ISOLATION CONTROL SYSTEM

摘要

A computing unit simulates an ideal operation of a vibration excitation actuator by using at least a model operation parameter and the vibration-excitation movable mass data and calculates a parameter corresponding to acceleration/deceleration thrust for moving the vibration-excitation movable mass. A vibration isolation controller determines a control content of a vibration isolation driving unit based on the parameter corresponding to the acceleration/deceleration thrust and controls an operation of the vibration isolation driving unit so that a force canceling a reaction force, which acts on an apparatus when a vibration-excitation movable mass is moved, acts on the apparatus by moving the vibration isolation movable unit.