| 摘要 |
A shape of a measurement object is measured based on an image obtained by applying light onto a stage having the measurement object mounted thereon and performing image formation of transmitted light or reflected light of the light on an imaging device. An image of the measurement object that is obtained by image formation on an imaging device is displayed within the range of the field of view, and feature quantity information is extracted based on the image of the measurement object. A determination is made as to whether feature quantity information approximately in agreement with the extracted feature quantity information is stored. If it is determined that the feature quantity information approximately in agreement with the extracted feature quantity information is stored, then the shape of the measurement object is measured based on information on measurement conditions stored in association with the feature quantity information.
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