发明名称 SPACER ARRANGING METHOD
摘要 A technique for arranging spacers with no streaks is provided. On columns of a light-shielding zone of a coating object, ejection positions are set and stored as temporary ejection positions in a memory unit. Random numbers of positive or negative real values are generated by a random number generating function. Every time a positive or negative random number is generated, one temporary ejection position and one random number are correlated to each other and stored as a random number coefficient R. Assuming that the coordinate of the temporary ejection position is expressed by (X, Y), a corrected ejection position (X+L×R, Y) is determined by multiplying the stored random number coefficient R with the interval L between the adjacent temporary ejection positions in the same column, and adding the value of the coordinate X to the multiplied value. The determined corrected ejection position is stored.
申请公布号 US2010058587(A1) 申请公布日期 2010.03.11
申请号 US20090621864 申请日期 2009.11.19
申请人 ULVAC, INC. 发明人 NAMEKAWA TAKUMI;HANE KOUJI;MASASUKE MATSUDAI;YOSHIO SUNAGA;JUNPEI YUYAMA;HIDENORI SUWA
分类号 B23P17/00 主分类号 B23P17/00
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