| 摘要 |
<p>PURPOSE: An apparatus which processes a substrate and a substrate transferring method of the same are provided to reduce processing time and improve output by gathering a processed substrate from a chamber and transferring the gathered substrate. CONSTITUTION: A plurality of process chambers(610-660) process a corresponding substrate. A buffer part(300) receives a substrate to be put into the process chambers and a processed substrate. A transfer unit(500) includes a plurality of pick-up hands(520), on which the substrate is placed, and moves transversely. The transfer unit transfers the substrate between the buffer part and the process chambers. At the same time, the processed substrates in two or more process chambers are gathered together and are transferred to the buffer part. The pick-up hands are spaced vertically and are arranged to be opposite each other.</p> |
