| 摘要 |
<P>PROBLEM TO BE SOLVED: To enhance detection accuracy of flaw of an inspection target. Ž<P>SOLUTION: A flaw detecter includes an imaging control part for controlling the imaging of the inspection target under a plurality of different imaging conditions, a flaw detecting part for detecting the flaw of the inspection target by analyzing a plurality of the obtained images, an imaging condition recording part for recording the imaging conditions when the images showing that the respective flaws of a plurality of inspection targets are detected are taken, and a detection control part for allowing the flaw detecting part to analyze the image taken under the same imaging condition as an imaging condition higher in flaw detecting frequency in a preferential order higher than an image taken under another imaging condition in the case where the flaw of another inspection target is detected after a plurality of the inspection targets to detect the flaw of the inspection target. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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