| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve machining quality by uniformizing output distribution of a laser beam with which a workpiece is irradiated with simple and inexpensive structure. <P>SOLUTION: A laser beam machining apparatus includes: a uniformizing means 2 for roughly uniformizing the output distribution of a laser beam L emitted from a laser oscillator 1; an image forming optical system 3 for forming the image of the laser beam L in which the output distribution is roughly uniformized by the uniformizing means 2; and a masking means 4 which is arranged near the position of forming the image of the laser beam L by the image forming optical system 3 and which cuts off the laser beam L to shape it for irradiating the workpiece 7. While the output distribution of the laser beam L emitted by the laser oscillator 1 is intrinsically close to the Gaussian distribution, the laser beam is put through the masking means 4 after once uniformized by the uniformizing means 2, so that the output distribution of the laser beam L with which the workpiece 7 is irradiated is unmixed with the non-uniformity of the original laser beam L. Consequently, machining quality is improved. <P>COPYRIGHT: (C)2010,JPO&INPIT |
