| 发明名称 |
Enhanced Ovl dummy field enabling on-the-fly ovl measurement methods |
| 摘要 |
A semiconductor wafer may include a dummy field configured to enable overlay measurements. The enhanced dummy field may include a plurality of encoding blocs that enable OVL measurements to be made throughout the enhanced dummy field.
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| 申请公布号 |
US2009303482(A1) |
申请公布日期 |
2009.12.10 |
| 申请号 |
US20090455640 |
申请日期 |
2009.06.04 |
| 申请人 |
LEVINSKI VLADIMIR;ADEL MICHAEL E;GHINOVKER MARK;SVIZHER ALEXANDER |
发明人 |
LEVINSKI VLADIMIR;ADEL MICHAEL E.;GHINOVKER MARK;SVIZHER ALEXANDER |
| 分类号 |
G01B11/00 |
主分类号 |
G01B11/00 |
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