| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer holding device preventing a wafer from rotating and falling off in unclamping the wafer. SOLUTION: A pinion 23 is provided on a body base 21 with a planar shape so as to rotate freely. Two of a first and second racks 25 and 27 are provided mutually parallel gearing at center-symmetric positions of the pinion 23 so as to move in opposite directions. A first and second movable members 31 and 35 are provided along the first and second racks 25 and 27 so as to slide freely, the first movable member 31 is fixed to the first rack 25, and the second movable member 35 is fixed to the second rack 27. A first and second arms 43 and 45 are fixed respectively on upper surfaces of the first and second movable members 31 and 35 so as to extend in left and right directions to movement directions of the first and second movable members 31 and 35. On top surfaces of a left and right top end sides of the first and second arms 43 and 45, there are provided a placing portion 15 having a placing surface on which a wafer 3 is placed and a pin portion 17 arranged projecting on the placing surface so as to clamp by abutting to an outer peripheral surface of the wafer 3. COPYRIGHT: (C)2010,JPO&INPIT |
