Method for designing a micro electromechanical device with reduced self-actuation,申请号EP20050112976-传众专利搜索

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发明名称	Method for designing a micro electromechanical device with reduced self-actuation
摘要
申请公布号	EP1675148(B1)	申请公布日期	2009.12.02
申请号	EP20050112976	申请日期	2005.12.23
申请人	IMEC	发明人	ROTTENBERG, XAVIER;TILMANS, HENDRIKUS
分类号	H01H59/00	主分类号	H01H59/00
代理机构		代理人
主权项
地址

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