| 摘要 |
PROBLEM TO BE SOLVED: To allow intermediate or high speed positional change of a microscope lens while maintaining the low speed or static positional control thereof. SOLUTION: A method for controlling the position of a microscope lens comprises: receiving a reference signal corresponding to a reference position of the microscope lens (401); receiving a measurement signal corresponding to an actual position of the microscope lens (402); receiving a deviation signal characteristic of a predetermined positional deviation from the reference position (403); and using the measurement signal, the deviation signal and the reference signal to generate a positional control signal for use in setting the position of the microscope lens (404). COPYRIGHT: (C)2010,JPO&INPIT |
