| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an MEMS switch in which a parasitic capacitance between a first contact electrode and a second contact electrode are reduced and a driving voltage is lowered and moreover a contact reliability is improved. <P>SOLUTION: The MEMS switch includes a base board 1, a pair of signal lines 34, 34 which are arranged on one surface side of the base board 1, have the first contact electrodes 35, 35, and a second contact electrode 25 which does not overlap on the first contact electrodes 35, 35 in a thickness direction of the first contact electrodes 35, 35 and is arranged in a diagonal direction inclining from the thickness direction against the first contact electrodes 35, 35. The switch is also provided with a piezo-electric driving actuator 4 composing a longitudinal direction driving portion with a thickness direction as a driving axis direction and a static driving actuator 5 composing a latitudinal driving portion with a right angle crossing direction to the thickness direction as a driving axis direction, as a driving means for displacing the second contact electrode 25 so that the second contact electrode 25 and the first contact electrodes 35, 35 attach and detach with each other. <P>COPYRIGHT: (C)2010,JPO&INPIT |
