发明名称 METHOD FOR FORMING A THROUGH-HOLE ELECTRODE AND STRUCTURE THEREFORE
摘要 PURPOSE: A method for forming a through hole electrode using an aluminum foil is provided to improve an electrical property by enhancing a filling rate. CONSTITUTION: In a method for forming a through hole electrode using an aluminum foil, at least one through hole(110) having a fixed pattern is formed on a substrate(100). A seed layer(120) is formed by attaching a zincate-processed aluminum foil on a surface of one side of the substrate. A through hole electrode is formed by filling the through hole with a conductive material through the seed layer. The seed layer is removed.
申请公布号 KR20090110712(A) 申请公布日期 2009.10.22
申请号 KR20080036345 申请日期 2008.04.18
申请人 SUNGKYUNKWAN UNIVERSITY FOUNDATION FOR CORPORATE COLLABORATION 发明人 LEE, HO YOUNG;SUH, SU JEONG;YOUM, KWANG SEOP;KANG, CHI GOO;JEONG, GEUN HEE;LEE, YONG HO
分类号 H01L21/28 主分类号 H01L21/28
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