| 摘要 |
<P>PROBLEM TO BE SOLVED: To extend the service life of an RF screen by suppressing temperature rise of an RF (high frequency) filter by an IR (infrared ray) filter. Ž<P>SOLUTION: A lamp house 11 which shields the microwaves houses an electrodeless lamp 13, a magnetron 12, and a waveguide 15 for transmitting microwaves oscillated from the magnetron 12 to the electrodeless lamp 13. An emission window 112 is formed on the lamp house 11 for making ultraviolet rays emitted from the electrodeless lamp 13 pass therethrough. On the emission window 112, an IR cut filter 171 cutting infrared rays emitted from the electrodeless lamp 13, and an RF screen 172 shielding microwaves at the outside of the IR cut filter 171 are arranged as a screen 17 in a form tied to each other. Ultraviolet rays emitted from the electrodeless lamp 13 are emitted through the screen 17. The RF screen 172 receives the ultraviolet rays with infrared rays cut, and thereby suppresses the rise in the temperature to attain long service life for the screen 17. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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