Unit for exhausting particles and apparatus for transferring a substrate having the unit,申请号KR20070095160-传众专利搜索

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发明名称	Unit for exhausting particles and apparatus for transferring a substrate having the unit
摘要
申请公布号	KR100918588(B1)	申请公布日期	2009.09.28
申请号	KR20070095160	申请日期	2007.09.19
申请人		发明人
分类号	H01L21/02;H01L21/677	主分类号	H01L21/02
代理机构		代理人
主权项
地址

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