WIRING SUBSTRATE, LIQUID DROPLET DELIVERING HEAD, LIQUID DROPLET DELIVERING APPARATUS, AND METHOD FOR MANUFACTURING WIRING SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To ensure surely a GND electric potential while a drawing region for an individual wiring is ensured. SOLUTION: A GND front wiring 46A and a GND back wiring 46B are connected with the upper electrode 52 of a piezoelectric body 54 through a second electrically conductive member 45B filling a second through-hole 43B, and connected with a reference electric potential terminal 46C on the GND front wiring 46A side. The GND back wiring 46B are formed in a film shape on the whole face of a back face 42B, and on the outside of a first through-hole 43A, an annular insulating space 43C is constituted. By the insulating space 43C, insulation between a first electrically conductive member 45A filled from the first through-hole 43A and the GND back wiring 46B is performed. An individual wiring 44 and the GND front wiring 46A wired on the surface 42A are covered and protected with a resin protective film 47. COPYRIGHT: (C)2009,JPO&INPIT