发明名称 DEVICES WITH CAVITY-DEFINED GATES AND METHODS OF MAKING THE SAME
摘要 Disclosed are methods, systems and devices, including a method that includes the acts of forming a semiconductor fin, forming a sacrificial material adjacent the semiconductor fin, covering the sacrificial material with a dielectric material, forming a cavity by removing the sacrificial material from under the dielectric material, and forming a gate in the cavity.
申请公布号 WO2009111225(A1) 申请公布日期 2009.09.11
申请号 WO2009US35018 申请日期 2009.02.24
申请人 MICRON TECHNOLOGY, INC.;JUENGLING, WERNER 发明人 JUENGLING, WERNER
分类号 H01L21/336;H01L29/78 主分类号 H01L21/336
代理机构 代理人
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