| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection microscope or the like that does not make an objective lens collide with a glass substrate, even in focusing by a manual operation when inspection is performed using a sample or the like for evaluation thicker than a substrate to be usually inspected. SOLUTION: This inspection microscope includes a means for focusing on the surface of the glass substrate by using a focusing mechanism for moving a stage for mounting the glass substrate or the objective lens relatively in the observation optical axis direction, a means for detecting the positional information of the objective lens to the glass substrate when the surface of glass substrate is focused on, a means for setting a moving range where the stage and the objective lens are relatively movable based on the detected positional information, and a means for setting a moving range where the stage and the objective lens are relatively movable when an operator manually operates the focusing mechanism based on the detected positional information. COPYRIGHT: (C)2009,JPO&INPIT
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