| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a light source apparatus capable of improving the stability of optical output of a deuterium lamp while achieving compactness. <P>SOLUTION: The light source apparatus cools only a power supply part 3 by partitioning the power supply part 3 from the deuterium lamp H with a partition wall W and makes air flow by fans 8 and 9 only inside a power supply housing space part S1. The deuterium lamp H is isolated as much as possible from temperature variations of the power supply part 3 in this way. The deuterium lamp H itself is surrounded by a lamp house 30 to eliminate the effects of variations of atmospheric temperature as much as possible. The lamp house 30 comes close to the partition wall W by making the light source apparatus 1 further compact and reducing the size of a light source housing space part S2 to separate the side wall 31 of the lamp house 30 opposed to the partition wall W from the partition wall W. The lamp house 30 additionally has a rectangular open part A at a part opposed to the side wall 31. <P>COPYRIGHT: (C)2009,JPO&INPIT |
