| 摘要 |
PROBLEM TO BE SOLVED: To provide polishing material excellent in workability (productivity), capable of attaining high-grade flatness and surface roughness, and ensuring less scratching in grinding and polishing work of glass, ceramics and metal. SOLUTION: The polishing material includes particles comprising graphite-based carbon and diamond with 30-250 nm median size and 2.63-3.38 g/cm<SP>3</SP>gravity, or includes mixed particles comprising particles comprising graphite-based carbon and diamond with 30-250 nm median size and particles comprising nano-sized diamond with 30-250 nm median size wherein the average gravity of the mixed particles is 2.63-3.38 g/cm<SP>3</SP>. COPYRIGHT: (C)2009,JPO&INPIT |
