| 摘要 |
PROBLEM TO BE SOLVED: To provide a vertical-cavity surface-emitting laser (VCSEL) array device of high reliability by allowing stress generated near an active layer to be controlled by an interlayer insulating film. SOLUTION: A VCSEL array device 20 includes a plurality of mesa portions 24 serving as light emitting portions, on a substrate 22. Internal stress generated between an oxidized region provided near the active layer and the interlayer insulating film can be reduced by using a separation groove 30 formed on a surface protection film 32 covering the interlayer insulating film, so that the increase of dislocations is suppressed, so that the VCSEL array device of high reliability is available. COPYRIGHT: (C)2009,JPO&INPIT
|
