WATER COOLING CYLINDER FOR SILICON CRYSTAL INGOT AND MANUFACTURING APPARATUS UTILIZING IT

摘要

A water cooling tube for cooling a silicon single crystalline ingot and an apparatus for growing a silicon single crystalline ingot using the same are provided to improve cooling efficiency by efficiently absorbing a radiant heat generated while an ingot is passed inside a water cooling tube. A water cooling tube(100) for cooling an ingot includes a cylindrical type cylinder main body(61), an inlet, and an outlet. The inlet and the outlet are prepared in the main body. In the cylindrical type cylinder main body, cooling water is flowed to a gap formed by an inner wall and an outer wall. An inner part of the main body is empty for passing of a silicon ingot(50). The water cooling tube includes a ceramic coating layer(62) coated on an outer surface of the main body. The ceramic coating layer includes a SiO2 sol-gel ceramic coating agent. The ceramic coating layer is embossed.