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发明名称
PLASMA REACTOR WITH OVERHEAD RF ELECTRODE TUNED TO THE PLASMA WITH ARCING SUPPRESSION
摘要
申请公布号
KR100903535(B1)
申请公布日期
2009.06.23
申请号
KR20047009697
申请日期
2002.09.25
申请人
发明人
分类号
H01J37/32;H05H1/46;H01L21/205;H01L21/3065;(IPC1-7):H01J37/32
主分类号
H01J37/32
代理机构
代理人
主权项
地址
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