SHOWER PLATE SINTERED INTEGRALLY WITH GAS RELEASE HOLE MEMBER AND METHOD FOR MANUFACTURING THE SAME

摘要

This invention provides a shower plate comprising gas release hole members (ceramic member or porous gas flow body) bonded by sintering integrally without any space and disposed, for plasma back flow prevention purposes, within vertical holes in a shower plate. The above constitution is advantageous in that the gas release member does not come off from the vertical holes during use of the shower plate, there is no variation in the amount of gas released from each vertical hole, the back flow of plasma can be more fully prevented, and plasma excitation with high efficiency can be realized. A shower plate (105) is disposed in a treatment chamber (102) in a plasma treatment apparatus, and plasma excitation gas is released into a treatment chamber (102) for generating plasma. A ceramic member having a plurality of gas release holes having a diameter of 20 mum to 70 mum and/or a porous gas flow body having pores having a maximum diameter of not more than 75 mum in communication with each other in the gas flow direction are bonded by sintering integrally with the inside of each of a number of vertical holes (105) as a release path for plasma excitation gas.