发明名称 |
PROCESS FOR OBTAINING A THIN, INSULATING, SOFT MAGNETIC FILM OF HIGH MAGNETIZATION, CORRESPONDING FILM AND CORRESPONDING INTEGRATED CIRCUIT |
摘要 |
A thin soft magnetic film combines a high magnetization with an insulating character. The film is formed by nitriding Fe-rich ferromagnetic nanograins immersed in an amorphous substrate. A selective oxidation of the amorphous substrate is then performed. The result is a thin, insulating, soft magnetic film of high magnetization. Many types of integrated circuits can be made which include a component using a membrane incorporating the above-mentioned thin film.
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申请公布号 |
US2009140384(A1) |
申请公布日期 |
2009.06.04 |
申请号 |
US20090367812 |
申请日期 |
2009.02.09 |
申请人 |
STMICROELECTRONICS S.A.;COMMISSARIAT A L'ENERGIE ATOMIQUE BATIMENT LE PONAND D |
发明人 |
BOUCHE GUILLAUME;ANCEY PASCAL;VIALA BERNARD;COUDERC SANDRINE |
分类号 |
H01L27/08;B32B15/00;C01G49/02;H01F1/01;H01F10/00;H01F10/13;H01F10/14;H01F10/32;H01F17/00;H01F41/18;H01F41/30;H01L23/552 |
主分类号 |
H01L27/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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