| 摘要 |
PROBLEM TO BE SOLVED: To quickly measure a resonance frequency and the maximum optical swing angle. SOLUTION: A method of measuring the resonance frequency and the maximum optical swing angle includes: making a laser beam incident on jitter sensors 31a, 31b by being driven in a drive frequency f of a MEMS mirror element 10; calculating a counterclockwise optical swing angleΘ<SB>CCW</SB>(f) and a clockwise optical swing angleΘ<SB>CW</SB>(f) by measuring respective time intervals of four jitter signals output in one reciprocal scanning of the laser beam; calculating the optical swing anglesΘ<SB>CCW</SB>(f),Θ<SB>CW</SB>(f) at each time when a drive frequency f is increased or decreased in every resolutionΔf; and calculating the maximum optical swing anglesΘ<SB>CCW</SB>(f<SB>0</SB>),Θ<SB>CW</SB>(f<SB>0</SB>) from the respective time intervals between the jitter sensors 31a, 31b in resonance frequency f<SB>0</SB>by regarding the prior drive frequency f as the resonance frequency f<SB>0</SB>when the optical swing anglesΘ<SB>CCW</SB>(f),Θ<SB>CW</SB>(f) are lessened as compared with the prior. COPYRIGHT: (C)2009,JPO&INPIT
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