| 摘要 |
PROBLEM TO BE SOLVED: To provide a resonation apparatus capable of raising an electro-mechanical coupling coefficient, without making the thickness of a piezo-electric layer thin compared with a case when the piezo-electric layer is homogeneous, and to provide its manufacturing method. SOLUTION: The resonation apparatus includes a support substrate 1, a lower electrode 31 formed on one front surface side of the support substrate 1, a piezo-electric layer 32 formed in the lower electrode 31 opposite to the support substrate 1 side, and an upper electrode 33 formed in the piezo-electric layer 32 opposite to the lower electrode 31 side. At the piezo-electric layer 32, a central region 32a in a thickness direction is formed with piezoelectric material of a composition ratio near the morphotropic phase boundary. Each of a lower region 32b between the central region 32a and the lower electrode 31 and an upper region 32c between the central region 32a and the upper electrode 33 is formed with piezoelectric material having bigger acoustic impedance than the central region 32a. COPYRIGHT: (C)2009,JPO&INPIT
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