| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum generating device capable of preventing suction, into an ejector, of foreign matters such as dust and metal powders existing in air outside of an ejector (an ejector type vacuum generating mechanism) even in the case of using the ejector for a long time, and improved in a maintenance cycle of the ejector. SOLUTION: This vacuum generating device includes: a vacuum generating mechanism (ejector type vacuum generating mechanism) 110, which comprises an air supply port 112 for leading compressed air, a switching means for switching a flow of the compressed air, a vacuum suction port 132 for leading vacuum condition generated by the switching means, an air discharge port 126 for discharging the compressed air to generate vacuum, a silencing means 124 provided in a front stage of the air discharge port 126 to reduce the discharge noise when discharging the compressed air; a filter member 134 arranged in a flow passage of the compressed air having passed through the silencing means 124; and a filter member holding means 142 for tightly fitting the filer member 134 to the air discharge port 126. COPYRIGHT: (C)2009,JPO&INPIT
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