PRESSURE SENSOR, SENSOR PROBE COMPRISING A PRESSURE SENSOR, MEDICAL APPARATUS COMPRISING A SENSOR PROBE AND A METHOD OF FABRICATING A SENSOR PROBE

摘要

The invention relates to a pressure sensor comprising a flexible membrane deformable in response to a pressure, which covers a cavity (2) and which comprises a strain gauge (21) that produces signals corresponding to the deformation of the flexible membrane, wherein the flexible membrane is a flexible monolithic integrated circuit foil (10). In this way the semiconductor integrated circuit itself serves as the flexible membrane, leading to a less complex fabrication process.