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发明名称
An assembly, a lithographic apparatus, and a device manufacturing method
摘要
申请公布号
EP1526407(A3)
申请公布日期
2009.04.22
申请号
EP20040077856
申请日期
2004.10.15
申请人
ASML NETHERLANDS B.V.
发明人
FRANKEN, DOMINICUS JACOBUS PETRUS ADRIANUS
分类号
G03F7/20;H01L21/027
主分类号
G03F7/20
代理机构
代理人
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地址
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