| 发明名称 |
MEMS SWITCH WITH SET AND LATCH ELECTRODES |
| 摘要 |
A MEMS device is electrically actuated with a voltage placed across a first electrode and a moveable material. The device may be maintained in an actuated state by latch electrodes that are separate from the first electrode.
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| 申请公布号 |
US2009086305(A1) |
申请公布日期 |
2009.04.02 |
| 申请号 |
US20080240931 |
申请日期 |
2008.09.29 |
| 申请人 |
IDC, LLC |
发明人 |
CHUI CLARENCE |
| 分类号 |
G02B26/00;H01H11/00;H01H59/00 |
主分类号 |
G02B26/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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