| 摘要 |
A polishing pad and a method of manufacture thereof are provided to guarantee the excellent adhesion strength of the polishing pad and the surface plate and to prevent the scratch in polishing by the polishing pad is instead of adhered to adhesive to the surface plate with a bolt. A polishing pad(P) comprises the abrasive layer(1); the fastener mechanism support layer(2) formed in the rear side of abrasive layer, and the groove(4) for the fastener mechanism passing through to the rear side in the surface of the polishing pad. The polishing pad is connected by the fastener mechanism in the surface plate, and the fastener mechanism support layer is the first class selected between the hard resin layer and the metal sheet.
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