| 摘要 |
An apparatus for forming a metal thin film by using laser and a method thereof are provided to reduce the thickness of the metal thin film for repairing a line defect as maintaining the film property identically. An apparatus for forming a metal thin film by using laser comprises the followings: laser oscillators(10a, 10b) which are arranged with a predetermined distance from a substrate(40) to oscillate a laser beam; a chamber(30) which makes the reaction as the laser beam is irradiated to the metal source gas; and a gas supply part which supplies the metal source gas to the chamber. The metal source gas is made of one or more metal atoms selected from the group of Ag, Au and Cu. |
