| 摘要 |
PROBLEM TO BE SOLVED: To reduce noise when vibrating a part carrying device by a high frequency. SOLUTION: A plate spring unit 390 has two plate springs 11 and 12 and a plurality of spacers 13. Substantially circular through-holes 11a and 12a are respectively formed in the four-corner parts in the plate springs 11 and 12. The spacers 13 are an annular ring-shaped plate-like body of forming a through-hole 13a of substantially the same diameter as the through-holes 11a and 12a in a central part. The spacers 13 are respectively arranged between the plate spring 11 and the plate spring 12, between the plate spring 12 and a piezoelectric vibration part 302 and between the plate spring 12 and a vibration transmitting part 303 in response to the though-holes 11a and 12a of the plate springs 11 and 12. The plate springs 11 and 12, the spacers 13, the piezoelectric vibration part 302 and the vibration transmitting part 303, are mutually fixed by a bolt 16 passing through the through-holes 11a, 12a and 13a. COPYRIGHT: (C)2009,JPO&INPIT
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