| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an actuator that can prevent cracks from being generated at a piezoelectric substance element layer comparatively easily and assuredly, keeping an excellent displacement behavior, and to provide a liquid injection head and a liquid injection apparatus. <P>SOLUTION: The actuator includes diaphragms 50, 55 provided on a substrate, and a piezoelectric substance element 300 having lower electrodes 60 provided on the diaphragms 50, 55, piezoelectric substance element layers 70 formed on the lower electrodes 60 and upper electrodes 80 provided on the piezoelectric substance element layers 70. Between the lower electrodes 60 and the upper electrodes 80 on the piezoelectric substance element 300, many low dielectric constant layers 75 with given widths composed of materials with dielectric constants lower than that of the piezoelectric substance element layer 70 are formed at given intervals along the longitudinal direction of the piezoelectric substance element 300. <P>COPYRIGHT: (C)2009,JPO&INPIT |
