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经营范围
发明名称
VERFAHREN ZUM ENTFERNEN EINES RESISTFILMS, SUBSTRAT-BEHANDLUNGSVORRICHTUNG UND COMPUTER-LESBARES AUFZEICHNUNGSMEDIUM
摘要
申请公布号
AT501775(B1)
申请公布日期
2009.01.15
申请号
AT20040009414
申请日期
2004.12.07
申请人
TOKYO ELECTRON LIMITED
发明人
分类号
H01L21/311;G03F7/42;H01L21/027
主分类号
H01L21/311
代理机构
代理人
主权项
地址
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