发明名称 |
APPARATUS FOR PRODUCING TRICHLOROSILANE |
摘要 |
<p>An apparatus for producing trichlorosilane, including: a reaction vessel in which a supply gas containing silicon tetrachloride and hydrogen is supplied to produce a reaction product gas containing trichlorosilane and hydrogen chloride; a heating mechanism that heats the interior of the reaction vessel; a storage container that stores the reaction vessel and the heating mechanism; a gas supply internal cylinder that supplies the supply gas in the reaction vessel; a gas discharge external cylinder that is substantially concentrically disposed outside the gas supply internal cylinder, forming a discharge passageway of the reaction product gas between an outer circumferential surface of the gas supply internal cylinder and an inner circumferential surface of the gas discharge external cylinder; and a cooling cylinder that supports the gas discharge external cylinder disposed inside thereof and includes a refrigerant passageway formed therein for circulating a refrigerant.</p> |
申请公布号 |
EP2008969(A1) |
申请公布日期 |
2008.12.31 |
申请号 |
EP20070830577 |
申请日期 |
2007.10.25 |
申请人 |
MITSUBISHI MATERIALS CORPORATION |
发明人 |
ISHII, TOSHIYUKI;ITO, HIDEO;SHIMIZU, YUJI |
分类号 |
C01B33/107;B01J12/00;B01J19/02;B01J19/24 |
主分类号 |
C01B33/107 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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