PRODUCTION OF METALLIC OXIDE THIN FILM,申请号JP19890014594-传众专利搜索

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发明名称	PRODUCTION OF METALLIC OXIDE THIN FILM
摘要
申请公布号	JPH02197578(A)	申请公布日期	1990.08.06
申请号	JP19890014594	申请日期	1989.01.24
申请人	SHIN ETSU CHEM CO LTD	发明人	KOINUMA HIDEOMI;YOSHIMOTO MAMORU;FUKUDA KUNIO;OKAZAKI SACHIKO;KOKOMA MASUHIRO
分类号	C23C18/14	主分类号	C23C18/14
代理机构		代理人
主权项
地址

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