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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPH03253071(A)
申请公布日期
1991.11.12
申请号
JP19900049312
申请日期
1990.03.02
申请人
HITACHI LTD
发明人
TAKAHASHI SHIGERU;HIRAISHI ATSUSHI;KOBAYASHI YUTAKA;NAMETAKE MASATAKE;MEGURO SATOSHI;IKEDA SHUJI
分类号
H01L27/11;H01L21/8244
主分类号
H01L27/11
代理机构
代理人
主权项
地址
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