除电装置及除电方法以及程式记录媒体,申请号TW096140984-传众专利搜索

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发明名称	除电装置及除电方法以及程式记录媒体
摘要
申请公布号	TW200826213	申请公布日期	2008.06.16
申请号	TW096140984	申请日期	2007.10.31
申请人	东京威力科创股份有限公司	发明人	筱原荣一;花轮一纪
分类号	H01L21/66(2006.01);G01R31/26(2006.01)	主分类号	H01L21/66(2006.01)
代理机构		代理人	林志刚
主权项
地址	日本

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