发明名称 PROCESS FOR MANUFACTURING OPTICAL AND SEMICONDUCTOR ELEMENTS
摘要 A method for fabricating an array of precisely shaped and located shaped elements utilizes a precisely shaped patterned abrasive to form channels in a workpiece. One or more patterned abrasives contact and abrade along one or more intersecting axes to define the shaped elements. The shaped elements may include optical elements, semiconductor elements, or both.
申请公布号 WO2006049825(A2) 申请公布日期 2006.05.11
申请号 WO2005US36639 申请日期 2005.10.11
申请人 3M INNOVATIVE PROPERTIES COMPANY 发明人 OUDERKIRK, ANDREW, J.;LUGG, PAUL, S.;BENSON, OLESTER, JR.;LEATHERDALE, CATHERINE, A.;JOSEPH, WILLIAM, D.
分类号 H01L33/20;H01L33/58 主分类号 H01L33/20
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