发明名称 PGO SOLUTIONS FOR THE PREPARATION OF PGO THIN FILMS VIA SPIN COATING
摘要 A method of preparing a PGO solution for spin coating includes preparing a 2-methoxyethanol organic solvent; adding Pb(OCH3CO)2¥3H2O to the organic solvent at ambient temperature and pressure in a nitrogen-filled gloved box to form Pb in methoxyethanol; refluxing the solution in a nitrogen atmosphere at 150Žfor at least two hours; fractionally distilling the refluxed solution at approximately 150Žto remove all of the water from the solution; cooling the solution to room temperature; determining the Pb concentration of the solution; adding the 2-methoxyethanol solution to the Pb 2-methoxyethanol until a desired Pb concentration is achieved; combining Ge(OR)4, where R is taken from the group of Rs consisting of CH2CH3 and CH(CH3)2, and 2-methoxyethanol; and adding Ge(OR)4 2-methoxyethanol to PbO 2-methoxyethanol to form the PGO solution having a predetermined metal ion concentration and a predetermined Pb:Ge molar ratio.
申请公布号 KR100575037(B1) 申请公布日期 2006.04.28
申请号 KR20037016903 申请日期 2003.12.24
申请人 发明人
分类号 H01L21/208 主分类号 H01L21/208
代理机构 代理人
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