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发明名称
VERFAHREN UND SCHALTUNGSANORDNUNG ZUR PRÄ ZISEN, DYNAMISCHEN DIGITALEN ANSTEUERUNG VON INSBESONDERE PIEZOAKTOREN FÜR MIKRPOSITIONIERSYSTEME
摘要
申请公布号
AT416404(T)
申请公布日期
2008.12.15
申请号
AT20040763753T
申请日期
2004.08.03
申请人
PHYSIK INSTRUMENTE (PI) GMBH & CO. KG
发明人
GEYER, BERNHARD;BESCH, BERTHOLD;JORDAN, SCOTT
分类号
G05B19/35;H01L41/04
主分类号
G05B19/35
代理机构
代理人
主权项
地址
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