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发明名称
MgO DEPOSITION MATERIAL
摘要
申请公布号
EP1777318(A4)
申请公布日期
2008.12.10
申请号
EP20050760170
申请日期
2005.07.13
申请人
MITSUBISHI MATERIALS CORPORATION;LG ELECTRONICS INC.
发明人
SAKURAI, HIDEAKI;MAYUZUMI, YOSHITAKA;HIRATA, HIROKI
分类号
H01J17/49;C04B35/04;C23C14/08;C23C14/24;C23C14/34;H01J9/02;H01J11/02;H01J11/22;H01J11/34;H01J11/40
主分类号
H01J17/49
代理机构
代理人
主权项
地址
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