| 摘要 |
A MEMS-fabricated filter device for an ophthalmic shunt and a method for making the same. The filter device may include: a membrane with a plurality of pores, substantially uniformly sized to achieve a therapeutic flow rate while substantially preventing bacterial passage therethrough; a pair of substrates, each bonded to an opposing side of the membrane, and each having an axial inlet opening at a distal end thereof, and a cross-shaped support disposed in one of the substrates, the cross-shaped support supporting the membrane. The filter device may also include: a substrate having a passage therethrough; a membrane, axially recessed from opposing ends of the substrate and having a plurality of pores, substantially uniformly sized to achieve a therapeutic flow rate while substantially preventing bacterial passage therethrough; and a conformal coating covering the membrane. The method may include depositing a membrane layer on a substrate, patterning pores in the membrane layer to define an initial size of the pores, backside etching the substrate to the membrane layer, and conformally coating the membrane layer.
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