发明名称 |
INTERFEROMETER AND METHOD FOR MEASURING CHARACTERISTICS OF OPTICALLY UNRESOLVED SURFACE FEATURES |
摘要 |
Disclosed is an interferometry analysis method that includes comparing information derivable from multiple interferometry signals corresponding to different surface locations of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics that relate to one or more under-resolved lateral features of the test object; and outputting information about the under-resolved surface feature based on the comparison.
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申请公布号 |
US2008266574(A1) |
申请公布日期 |
2008.10.30 |
申请号 |
US20080017531 |
申请日期 |
2008.01.22 |
申请人 |
GROOT PETER DE;DARWIN MICHAEL J;STONER ROBERT;GALLATIN GREGG M;LEGA XAVIER COLONNA DE |
发明人 |
GROOT PETER DE;DARWIN MICHAEL J.;STONER ROBERT;GALLATIN GREGG M.;LEGA XAVIER COLONNA DE |
分类号 |
G01B11/02 |
主分类号 |
G01B11/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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